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Hardware and software development
Научные технологии

Our developments

Marion Small YAG Laser
Internal circulation-type water cooling system Nd:YAG laser
High-repetition oscillation 20Hz
High-power oscillation
Multiple wavelength oscillation with the wavelength conversion unit    1064nm 532nm 355nm 266nm
Callisto Laser Processing Unit
High-speed repeat laser oscillation 30Hz 60Hz
Multi-wavelength oscillation 1064nm, 532nm, 355nm, 266nm
High-power, large area laser processing
User-friendly color LCD touch panel
URANUS Contrast Auto Focus
Unique technology for edge enhancement operation
-Configuration of the optimum numbers of AFV samples is possible, realizing high-speed focusing which reduces the time for focus completion to one third of that for conventional one.
-Employed with the unique logic, this equipment is capable of acquiring the optimum AFV peak, successfully increasing focus reproducibility by ore than three times than the conventional one.
Polaris SeriesNon-Conatct High-Speed 3D Profiler
Measurement of PS height, BM step and RGB surface
Mercury SeriesUltra-precise coordinate measuring system
Photo mask dimension measurement,
Pattern dimension accuracy inspection for TFT array and CF substrates
AsteroidII SeriesMacro review station
Typical application : Oblique lighting visual inspection
Jupiter SeriesDefect repair / observation system
CF protrusion repair, OC foreign material protrusion repair, ITO short bridge cut
Color resist hole repair, BM open repair, TFT pattern repair
Capricorn CF SeriesColor Filter (CF) pattern inspection system
For CF line : BM Pattern inspection, RGB pattern inspection, CF final inspection
For CELL process : PI Layer inspection, Seal defect inspection, Spacer inspection

Projects

Marion Small YAG Laser
Internal circulation-type water cooling system Nd:YAG laser
High-repetition oscillation 20Hz
High-power oscillation
Multiple wavelength oscillation with the wavelength conversion unit    1064nm 532nm 355nm 266nm
Callisto Laser Processing Unit
High-speed repeat laser oscillation 30Hz 60Hz
Multi-wavelength oscillation 1064nm, 532nm, 355nm, 266nm
High-power, large area laser processing
User-friendly color LCD touch panel
URANUS Contrast Auto Focus
Unique technology for edge enhancement operation
-Configuration of the optimum numbers of AFV samples is possible, realizing high-speed focusing which reduces the time for focus completion to one third of that for conventional one.
-Employed with the unique logic, this equipment is capable of acquiring the optimum AFV peak, successfully increasing focus reproducibility by ore than three times than the conventional one.
Polaris SeriesNon-Conatct High-Speed 3D Profiler
Measurement of PS height, BM step and RGB surface